I am reaching out to the community for assistance with a persistent issue we are experiencing with our coater(PDS 2010 LABCOTER™ 2 Parylene), specifically related to the vaporizer not heating up properly. Below is a summary of the situation and the steps we have taken so far:
Initial Problem: The vaporizer in our coater is not heating up. Despite several attempts and checks, the issue persists.
Diagnostic Steps Taken:
Thermal Fuse Check: I tested the thermal fuse with a multimeter, following guidance, and confirmed that it is functioning correctly.
Pressure Check: I pumped down the coater to below 15mTorr. During this, the pressure was recorded at 9 mTorr.
Visual Inspections: Photos were taken of the "Direct Logic 105" controller and the general setup when the pressure was at 9 mTorr for reference and diagnostic purposes.
Current Observations:
When the vaporizer is switched to 'on', it gets stuck at a temperature of 36°C, which is abnormal.
The PLC (Programmable Logic Controller) part was also photographed for further inspection. The chamber pressure was again at 9 mTorr during this.
The Y2 light on the PLC is not on, but all controller settings align with the manual's specifications.
Despite these steps, the core issue of the vaporizer temperature remains unresolved. I am attaching the relevant photos for reference. Any insights, suggestions, or recommendations from the community would be greatly appreciated, as this issue is critical to our ongoing work.
Thank you in advance for your help and expertise.