--Similar to the above case, which parameter shall I refer to as the scale factor?
The parameter sensitivity can be taken as the scale factor. And please note that the range of this parameter can be calculated as: in 2g range, (Value_max/min – Value_typical)/Value_typical, here is (1065-1024)/1024= 4%; (983-1024)/1024=-4%, so in summary +/- 4%
--What exactly is the ‘Alignment Error’?
The alignment Error is refer to the direction mis-alignment between the MEMS(sensing part) and the package outline. so the real detecting direction of the X,Y can be a slight different from mounted direction(outline package).
--Why is the unit for the non-linearity ‘%’ ? Shouldn’t it be a function of the true acceleration?
the non-linearity can be calculated/measured: max(output_measured – output_expected) / full-range , so this is why the unit is %
--Also similarly to the above case, is there a term for the misalignment of the sensors (with respect to each other) in the sheets?
The min/max value of each parameter represent the 3σ, which means 99.73% sensors are within the (u-3σ, u+3σ) range, so this can be taken as the difference between sensors.
And the non-orthogonality seems more like alignment error.
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